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Process Gas: SiH4 (Silane Gas). Manufacturer: Celerity. The seals are still in perfect condition as they have not been touched. Flow Rate: 200 SCCM. Valve Position: Normally Closed. Interface: DeviceNet (5 Pin "M8").
When you click on links to various merchants on this site and make a purchase, this can result in this site earning a commission. Affiliate programs and affiliations include, but are not limited to, the eBay Partner Network.